Semiconductor device having vertical mos transistor and method for manufacturing the semiconductor device

ABSTRACT

A method for manufacturing a semiconductor device including a vertical MOS transistor, includes forming a trench for shallow trench isolation in a semiconductor substrate, and burying an element isolation insulating film in the trench, forming an insulating film to be a mask for forming a semiconductor pillar, in a region subjected to shallow trench isolation, etching the semiconductor substrate in the region subjected to the shallow trench isolation with the insulating film as a mask, and forming a semiconductor pillar for the vertical MOS transistor, implanting an impurity onto the semiconductor substrate, and forming a lower diffusion layer in the portion shallower than the depth of the shallow trench isolation, and forming a gate insulating film on the semiconductor substrate and the side surface of the semiconductor pillar for the vertical MOS transistor.

INCORPORATION BY REFERENCE

The present application is a Divisional application of U.S. patent application Ser. No. 12/230,562, filed on Sep. 2, 2008, which is based on and claims priority from Japanese Patent Application No. JP 2007-232591, filed on Sep. 7, 2007, the entire content of which is incorporated herein by reference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a semiconductor device, more specifically, a semiconductor device having a vertical MOS transistor.

2. Description of the Related Art

Recently, a three-dimensional structure type MOSFET in which a gate structure is made three-dimensional is proposed for increasing an integration degree of a semiconductor device. Such as the three-dimensional structure type MOSFETs, an FinFET in which a channel layer of a Fin structure is sandwiched by gate electrodes, an surrounding gate transistor (hereinafter, called SGT) in which agate electrode is formed around a silicon pillar are known.

Of them, an SGT has the structure in which the source, the gate and the drain are disposed in the perpendicular direction to the substrate, and the gate surrounds the silicon pillar. Accordingly, an SGT has the occupation area reduced significantly as compared with a planar type MOSFET. Therefore, an SGT is significantly expected to be applied to a DRAM, Flash EEP ROM and CMOS.

In an SGT structure, for example, as shown in FIGS. 11A and 11B, in Japanese Patent Laid-Open No. 6-53513, microscopic columnar protrusion (silicon pillar) 103 in a circular cylindrical shape is placed in the region surrounded by element isolation insulating film 102 formed by a LOCOS method on p-type silicon substrate 101, and a source and drain region constituted of n-type diffusion layers (upper diffusion layer 107 and lower diffusion layer 104) are respectively formed on the top portion and bottom portion of the columnar protrusion, and gate electrode 106 is formed around the columnar protrusion via gate insulating film 105. In this document, contact 109 to the gate electrode is taken from the gate material which is led outside the element isolation region. Contacts 108, 110 are connected to upper diffusion layer 107, and lower diffusion layer 104, respectively. Here, FIG. 11A is a plane view, and FIG. 11B is a sectional view.

While miniaturization of elements is underway, element isolation by a LOCOS method has the problem of being incapable of forming a microscopic element isolation region. Thus, element isolation region of 250 nm or less becomes possible by a shallow trench isolation (hereinafter, called STI).

When an SGT structure is provided by forming a silicon pillar in the region of the silicon substrate subjected to element isolation by such STI, if STI is to be formed after the silicon pillar is formed, the substrate thickness is required by that amount, and the silicon pillar has to be protected at the time of formation of STI. Thus, formation of the silicon pillar by etching the substrate after formation of STI is generally conceivable.

Thereafter, the lower diffusion layer is formed, an insulating film is formed on the silicon substrate including the side surface of the silicon pillar, the gate electrode material is deposited, and the SGT structure in which the gate electrode is formed on the side surface of the silicon pillar by etch back or the like is completed.

In the conventional planar type MOS transistor, an unnecessary portion of the gate electrode material is all removed at the time of processing the gate electrode, and therefore, the portion which becomes floating state is not formed.

However, in the case of forming the vertical MOS transistor in which the silicon pillar is formed by etching the silicon substrate at the area surrounded by the STI region, the channel part is formed by covering the silicon pillar with the gate insulating film and the gate electrode, and the diffusion layers to be the source and drain are included on the top and bottom of the channel part, the gate electrode material remains on the side surface of the STI insulating film at the time of formation of the gate electrode.

The gate electrode material remaining on the side surface of the STI insulating film is brought into a floating state, and as a result, when electric charge is injected into the gate electrode material brought into the floating state by certain influence during operation of the MOS transistor, its potential changes to cause the problem that the parasitic MOS in the STI region operates.

When the diameter of the silicon pillar is made smaller, the contact to the upper diffusion layer and the contact to the gate electrode move closer to each other, and ultimately, separation of the contacts becomes difficult. As shown in Japanese Patent Laid-Open No. 6-53513, leading the gate contact to the outside of the element isolation region is difficult due to interference of the height of the STI insulating film, and formation of the gate contact with an easier method is desired.

The present inventor has recognized that, in the vertical MOS transistor in which the silicon pillar is formed by etching the silicon substrate at the portion surrounded by the STI region, the channel part is formed by covering the silicon pillar with the gate insulating film and the gate electrode, and the diffusion layers to be the source and drain are included on the top and bottom of the channel part, the parasitic MOS operation by the gate electrode material remaining on the side surface of the STI insulating film becomes a problem.

Further, separation of the upper diffusion layer contact and the gate contact when a microscopic silicon pillar is formed is difficult.

SUMMARY

The present invention seeks to solve one or more of the above problems, or to improve upon those problems at least in part.

In one embodiment, there is provided a method for manufacturing a semiconductor device including a vertical MOS transistor, including forming a trench for shallow trench isolation in a semiconductor substrate, and burying an element isolation insulating film in the trench, forming an insulating film to be a mask for forming a semiconductor pillar, in a region subjected to shallow trench isolation, etching the semiconductor substrate in the region subjected to the shallow trench isolation with the insulating film as a mask, and forming a semiconductor pillar for the vertical MOS transistor, implanting an impurity onto the semiconductor substrate, and forming a lower diffusion layer in the portion shallower than the depth of the shallow trench isolation, forming a gate insulating film on the semiconductor substrate and the side surface of the semiconductor pillar for the vertical MOS transistor, depositing a gate electrode material, etching back the gate electrode material, and leaving a gate electrode on the side surface of the semiconductor pillar for the vertical MOS transistor on which the gate insulating film is formed, and leaving the gate electrode material on the side surface of the element isolation insulating film, forming an interlayer insulating film and flattening the interlayer insulating film to the height of the mask insulating film, removing the mask insulating film on the semiconductor pillar for the vertical MOS transistor, and forming a sidewall insulating film in an opening which is formed, implanting an impurity via the sidewall insulating film, and forming an upper diffusion layer on the top portion of the semiconductor pillar for the vertical MOS transistor, and forming an electrode which contacts the gate electrode material on the side surface of the element isolation insulating film.

The gate electrode material can be formed on the side surface of the element isolation insulating film is formed to be in contact with the gate electrode of the vertical MOS transistor. Forming an electrode is forming an electrode which contacts the gate electrode material on the side surface of the semiconductor pillar of a dummy transistor different from the vertical MOS transistor. The semiconductor pillar for the vertical MOS transistor is formed close to the region subjected to the shallow trench isolation, or close to the semiconductor pillar for the dummy transistor, and the gate electrode material formed on the side surface of the element isolation insulating film, or a gate electrode material of the dummy transistor in contact with the gate electrode material formed on the side surface of the element isolation insulating film is formed to be in contact with the gate electrode of the vertical MOS transistor.

According to the present invention, by supplying a predetermined voltage to the gate electrode material remaining on the side surface of the STI insulating film, and by controlling the potential, the problem of the gate electrode material remaining on the side surface of the STI insulating film being brought into a floating state can be solved. As a result, the stable operation of the integrated circuit using the vertical MOS transistor is made possible.

Further, by providing a dummy transistor at least partially in contact with the gate electrode material of the side surface of the STI insulating film, and by providing the electrode contacting the gate electrode, the dummy transistor contact can be formed in the same process as the gate extraction electrode of the vertical MOS transistor, and the potential of the gate electrode material remaining on the side surface of the STI insulating film can be controlled via the dummy transistor contact. Therefore, the process can be simplified.

Further, by bringing the gate electrode material of the side surface of the STI insulating film and the gate electrode of the vertical MOS transistor into contact with each other, or by bringing them into contact with each other via the dummy transistor, the problem of the gate electrode material remaining on the side surface of the STI insulating film being brought into a floating state can be solved, and at the same time, the gate potential of the vertical MOS transistor can be controlled. Therefore, formation of a new contact for the gate electrode of the vertical MOS transistor is not required, and the degree of freedom of the wiring layout increases.

BRIEF DESCRIPTION OF THE DRAWINGS

The above features and advantages of the present invention will be more apparent from the following description of certain preferred embodiments taken in conjunction with the accompanying drawings, in which:

FIG. 1A to FIG. 1H are sectional views explaining one process of a manufacturing process of a semiconductor device which is a first exemplary embodiment of the present invention;

FIG. 2A is a partial sectional view showing the configuration of the semiconductor device which is the first exemplary embodiment of the present invention, whereas FIG. 2B is a schematic plane view of the same;

FIG. 3A is a sectional view showing the configuration in one element isolation unit of the semiconductor device which is the first exemplary embodiment of the present invention, whereas FIG. 3B is a schematic plane view of the same;

FIG. 4A to FIG. 4H are sectional views explaining one process of a manufacturing process of a semiconductor device which is a second exemplary embodiment of the present invention;

FIG. 5A is a partial sectional view showing the configuration of the semiconductor device which is the second exemplary embodiment of the present invention, whereas FIG. 5B is a schematic plane view of the same;

FIGS. 6A and 6B are schematic plane views explaining modified examples of a contact position in the semiconductor device which is the second exemplary embodiment of the present invention;

FIG. 7A to FIG. 7G are sectional views explaining one process of a manufacturing process of a semiconductor device which is a third exemplary embodiment of the present invention;

FIG. 8A is a partial sectional view showing the configuration of the semiconductor device which is the third exemplary embodiment of the present invention, whereas FIG. 8B is a schematic plane view of the same;

FIG. 9A to FIG. 9G are sectional views explaining one process of a manufacturing process of a semiconductor device which is a fourth exemplary embodiment of the present invention;

FIG. 10A is a partial sectional view showing the configuration of the semiconductor device which is the fourth exemplary embodiment of the present invention, whereas FIG. 10B is a schematic plane view of the same; and

FIG. 11A is a plane view of an SGT structure which is a related art, whereas FIG. 11B is a sectional view of the same.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

The invention will be now described herein with reference to illustrative embodiments. Those skilled in the art will recognize that many alternative embodiments can be accomplished using the teachings of the present invention and that the invention is not limited to the embodiments illustrated for explanatory purposes.

First Exemplary Embodiment Configuration of the First Exemplary Embodiment

As shown in the sectional view of FIG. 2A, in a semiconductor device in which a vertical MOS transistor including lower diffusion layer 6 and upper diffusion layer 11, with Si pillar 3 made a channel part, and including gate insulating film 7 and gate electrode 8 on a side wall of the channel part is formed in a region surrounded by STI insulating film 2, and lower diffusion layer 6 is formed in a portion shallower than the depth of STI, a contact and STI sidewall electrode 14 are formed in gate electrode material 8′ (hereinafter, called a conductive sidewall) formed on a side wall of STI insulating film 2.

FIGS. 3A and 3B show the portions shown in FIGS. 2A and 2B by expanding them to the entire region surrounded by STI insulating film 2, and as gate electrodes 8 formed on the sidewalls of Si pillar 3 and Si pillar 3 a are in contact with each other, gate extraction electrode 15 of the vertical MOS transistor can be led out at an upper portion of Si pillar 3 a by providing a contact hole in insulating film 9. Here, Si pillar 3 a configures a dummy transistor. Doping for Si pillar 3 a may be the same conductive type doping as for lower diffusion layer 6, or may be the same conductive type doping as for the channel of Si pillar 3. Further, lower diffusion layer electrode 16 is formed at an optional position within the element isolation region by providing a contact hole in insulating film 9.

The description of the manufacturing method will be described by using FIG. 2A and FIG. 2B.

For electrode 14 which contacts conductive sidewall 8′ formed on the side surface of STI insulating film 2, an optional place can be selected like contact (1) to contact (III), as shown in the plane view of FIG. 2B. The contact position can be selected in the portion which does not interfere with the disposition of electrode 13 connected to upper diffusion layer 11 of the vertical MOS transistor, and disposition of wiring on the upper layer from it.

As described above, by supplying a predetermined voltage to electrode 14 which contacts with conductive sidewall 8′ formed on the side surface of STI insulating film 2, conductive sidewall 8′ can be prevented from being brought into a floating state.

Manufacturing Method of the First Exemplary Embodiment

A method for manufacturing the present exemplary embodiment shown in FIGS. 2A and 3A will be described by using FIG. 1A to FIG. 1H.

In the method for manufacturing the semiconductor device including the vertical MOS transistor in the first exemplary embodiment includes

(1) forming a trench for shallow trench isolation in a semiconductor substrate, and burying an element isolation insulating film in the trench,

(2) forming an insulating film to be a mask for forming a semiconductor pillar, in a region subjected to shallow trench isolation,

(3) etching the semiconductor substrate in the region subjected to the shallow trench isolation with said insulating film as a mask, and forming a semiconductor pillar for the vertical MOS transistor,

(4) implanting an impurity onto the semiconductor substrate, and forming a lower diffusion layer in the portion shallower than the depth of the shallow trench isolation,

(5) forming a gate insulating film on the semiconductor substrate and the side surface of the semiconductor pillar for the vertical MOS transistor;

(6) depositing a gate electrode material, etching back the gate electrode material, and leaving a gate electrode material on the side surface of the semiconductor pillar for the vertical MOS transistor on which the gate insulating film is formed, and leaving the gate electrode material on the side surface of the element isolation insulating film,

(7) forming an interlayer insulating film and flattening the interlayer insulating film to the height of the mask insulating film,

(8) removing the mask insulating film on the semiconductor pillar for the vertical MOS transistor, and forming a sidewall insulating film in an opening which is formed,

(9) implanting an impurity via the sidewall insulating film, and forming an upper diffusion layer on the top portion of the semiconductor pillar for the vertical MOS transistor, and

(10) forming an electrode which contacts the gate electrode material on the side surface of the element isolation insulating film.

First, as shown in FIG. 1A, STI insulating film 2 is formed in Si substrate 1 in which a well layer with a boron concentration of 1e17/cm³ is formed. The STI insulating film 2 can be formed by an ordinary method. Specifically, STI insulating film 2 is formed by forming a trench for STI in the silicon substrate by Si dry etching, burying the insulating film in the trench and flattening it. Here, the depth of STI is set at 220 nm.

Next, as shown in FIG. 1B, an Si processing mask (shown by SiO₂ film 4 of a film thickness of 10 nm and SiN film 5 of a film thickness of 80 nm in the drawing) is formed in the portion where Si pillar 3 is to be formed, and Si pillar 3 is formed by ordinary Si dry etching. At this time, the diameter of Si pillar 3 is set at 100 nm, and the height of the Si pillar is set at 120 nm. In the sectional view, Si pillar 3 is shown as if it were not surrounded by STI insulating film 2, but Si pillar 3 is formed in the portion surrounded by the shallow trench isolation region (STI insulating film 2) in plane view, as shown in FIG. 3B. Further, Si pillar 3 a can be formed similarly, but the description of Si pillar 3 a will be omitted in the following description unless it is necessary since Si pillar 3 a is treated in the same process as Si pillar 3.

Thereafter, as shown in FIG. 1C, lower diffusion layer 6 and gate insulating film 7 are formed. Lower diffusion layer 6 is formed by ordinary ion implantation (arsenic, 20 keV, 3e13/cm²) and thermal treatment (in N₂, 1000° C., 10 s). Gate insulating film 7 may formed by thermally oxidizing the side surface of the Si pillar, or may be formed by an ordinary film deposition method. In this case, gate oxide film 7 of a film thickness of 5 nm is formed by thermal oxidation (wet-O₂, 800° C.).

Next, as shown in FIG. 1D, after gate electrode material 8 is deposited on the entire surface, gate electrode 8 is formed on the side surface of Si pillar 3 by an ordinary etch back method as shown in FIG. 1E. In this case, as the gate electrode material, polycrystalline silicon of a film thickness of 50 nm with phosphor doped by 4e20/cm³ is used. At this time, the gate electrode material (conductive sidewall 8′) also remains on the side surface of STI insulating film 2.

Thereafter, as shown in FIG. 1F, insulating film 9 is deposited and flattened. In this case, a silicon oxide film is used as insulating film 9, and flattening is carried out by an ordinary CMP (Chemical Mechanical Polishing) method. The stopper in the CMP method is SiN film 5 which is used as the Si pillar processing mask.

Subsequently, as shown in FIG. 1G, SiN film 5 on Si pillar 3 is removed, and sidewall 10 of an insulating film is formed on the side surface of the opening of the portion where SiN film 5 is removed. SiN film 5 on Si pillar 3 a is kept not to be removed by being covered with an insulating film as shown in the example which will be described later. In this case, sidewall 10 is formed by using an SiN film, and by etching back the SiN film after depositing the SiN film. Next, upper diffusion layer 11 is formed by ion implantation (arsenic, 20 keV, 3e13/cm²) and thermal treatment (in N₂, 1000° C., 10 s) after formation of sidewall 10.

Next, as shown in FIG. 1H, a contact hole is provided in insulating film 9 in the portion where STI sidewall electrode 14 is formed. In this case, resist mask 12 is formed by ordinary photolithography, and the contact hole is provided. Finally, after resist mask 12 is removed, silicon oxide film 4 is etched with insulating film sidewall 10 as the mask to expose upper diffusion layer 11, and electrode 13 and electrode 14 are buried. In this case, electrodes 13 and 14 are made from tungsten and formed by deposition of a tungsten film and a CMP method. Further, gate extraction electrode 15 and lower diffusion layer electrode 16 as shown in FIGS. 3A and 3B are formed.

The structure shown in FIG. 2A and FIG. 3A is completed by the method as above. Bias which does not turn on conductive sidewall 8′ formed on the side surface of STI insulating film 2 as parasitic MOS can be applied to electrode 14, separately from gate electrode 8 of the vertical MOS transistor. Naturally, electrode 14 may be connected to gate extraction electrode 15 in an upper layer so as to be operated at the same potential as gate electrode 8 of the vertical MOS transistor.

Second Exemplary Embodiment Configuration of the Second Exemplary Embodiment

As shown in the sectional view of FIG. 5A and the plane view of FIG. 5B, in a semiconductor device in which a vertical MOS transistor including lower diffusion layer 6 and upper diffusion layer 11, with Si pillar 3 made a channel part, and including gate insulating film 7 and gate electrode 8 on the side of the channel part is formed in a region surrounded by STI insulating film 2, and lower diffusion layer 6 described above is formed in a portion shallower than the depth of STI, a gate electrode material or a silicon pillar of a dummy transistor formed through the same process as the above described vertical MOS transistor is formed on the side wall of STI insulating film 2 so as to be at least in contact with the side wall, and a contact (dummy transistor contact (I)) and electrode 14 are formed in gate electrode material 8 of the above described dummy transistor in contact with the side surface of STI insulating film 2.

As described above, the dummy transistor is formed in contact with the side wall of STI insulating film 2, and the potential of electrode 14 in contact with the gate electrode material of the dummy transistor is controlled, whereby the gate electrode material (conductive sidewall 8′) remaining on the side surface of the STI insulating film can be prevented from being brought into a floating state. Further, in this example, the contact is formed in the gate electrode material of the dummy contact. Therefore, electrode 14 can be formed at the same time as formation of gate extraction electrode 15 of the vertical MOS transistor, and the process can be simplified.

In this example, Si pillar 3 b configuring the dummy transistor is formed in contact with one side surface of STI insulating film 2, but as shown in FIG. 6A, Si pillar 3 b may be formed at a corner portion of STI insulating film 2, and a contact (dummy transistor contact (II)) and electrode 14 may be formed in the gate electrode material of the dummy transistor. Further, as shown in FIG. 6B, Si pillar 3 b is formed by being separated from STI insulating film 2 so that only gate electrode material 8 is in contact with Si pillar 3 b, and a contact (dummy transistor contact (III) or (IV)) and electrode 14 may be formed in the gate electrode material of the dummy transistor. By optionally selecting the formation positions of the dummy transistor and its contact like this, the formation positions can be selected in the position which does not interfere with disposition of electrode 13 connected to upper diffusion layer 11 of the vertical MOS transistor and disposition of the wiring further on an upper layer of it.

Manufacturing Method of the Second Exemplary Embodiment

A method for manufacturing the exemplary embodiment shown in FIG. 5A will be described by using FIG. 4A to FIG. 4H.

In the method for manufacturing the semiconductor device including the vertical MOS transistor according to the second exemplary embodiment includes

(1) forming a trench for shallow trench isolation in a semiconductor substrate, and burying an element isolating insulating film in the trench;

(2) forming an insulating film to be a mask for forming a semiconductor pillar for the vertical MOS transistor, in a region subjected to shallow trench isolation, and an insulating film to be a mask for forming a semiconductor pillar for the dummy transistor to be close to or to be partially overlaid on the region subjected to the shallow trench isolation;

(3) etching the semiconductor substrate in the region subjected to the shallow trench isolation with the mask insulating film, and forming semiconductor pillars for the vertical MOS transistor and the dummy transistor;

(4) implanting an impurity onto the semiconductor substrate, and forming a lower diffusion layer in the portion shallower than the depth of the shallow trench isolation;

(5) forming a gate insulating film on the semiconductor substrate and the side surfaces of the semiconductor pillars for the vertical MOS transistor and the dummy transistor;

(6) depositing a gate electrode material, etching back the gate electrode material, and leaving a gate electrode on the side surface of the semiconductor pillar for the vertical MOS transistor on which the gate insulating film is formed, and leaving the gate electrode material continuing from the side surface of an element isolation insulating film to the side surface of the semiconductor pillar for the dummy transistor;

(7) forming an interlayer insulating film and flattening the interlayer insulating film to the height of the mask insulating film;

(8) removing the mask insulating film on the semiconductor pillar for the vertical MOS transistor, and forming a side wall insulating film in an opening which is formed;

(9) implanting an impurity via the side wall insulating film, and forming an upper diffusion layer on the top portion of the semiconductor pillar for the vertical MOS transistor; and

(10) forming an electrode which contacts the gate electrode material on the side surface of the semiconductor pillar of the dummy transistor.

First, as shown in FIG. 4A, STI insulating film 2 is formed in Si substrate. The method for forming the well and STI insulating film 2 is as in the first exemplary embodiment.

Next, as shown in FIG. 4B, Si processing masks (4, 5) are formed in the portion where Si pillars 3 and 3 b are to be formed as in the first exemplary embodiment, and Si pillars 3 and 3 b are formed by ordinary Si dry etching. Here, the constitution differing from that of the first exemplary embodiment is that Si pillar 3 b in contact with the side surface of STI insulating film 2 is also formed for the dummy transistor. In the sectional view, Si pillar 3 at the left side in the drawing is shown as if it were not surrounded by STI insulating film 2, but Si pillar 3 at the left side in the drawing is formed in the portion surrounded by STI insulating film 2, as shown in FIGS. 3A and 3B in plane view. Further, Si pillar 3 a is also formed at the left side of Si pillar 3 as shown in FIGS. 3A and 3B. The method for forming the above described Si pillars 3 and 3 b is the same as that of the first exemplary embodiment.

Thereafter, as shown in FIG. 4C, lower diffusion layer 6 and gate insulating film 7 are formed. Lower diffusion layer 6 is formed by ordinary ion implantation and thermal treatment. Gate insulating film 7 may be formed by thermally oxidizing the side surfaces of the Si pillars 3 and 3 b, or may be formed by an ordinary film deposition method. The method for forming lower diffusion layer 6 and gate insulating film 7 is the same as that of the first exemplary embodiment.

Next, as shown in FIG. 4D, gate electrode 8 is formed on the side surfaces of Si pillars 3 and 3 b. Gate electrode 8 is formed by an ordinary etch back method after the gate electrode material is deposited. At this time, the gate electrode material also remains on the side surface of STI insulating film 2. The method for forming the gate electrode is the same as that of the first exemplary embodiment.

Subsequently, as shown in FIG. 4E, insulating film 9 is deposited and flattened. In this case, flattening of insulating film 9 is carried out by an ordinary CMP method, and the stopper in the CMP method is SiN film 5 which is used as the Si pillar processing mask. Further, after thin insulating film 17 is deposited, thin insulating film 17 described above on an upper portion of Si pillar 3 at the left in the drawing is removed by using ordinary lithography and dry etching. In this case, as thin insulating film 17 described above, a material which is not etched by hot phosphoric acid for removing the above described SiN, and which is higher in HF etching speed than insulating film 9 described above is selected. In this case, an SOG film of a film thickness of 50 nm is selected as thin insulating film 17 described above.

Next, as shown in FIG. 4F, SiN film 5 on Si pillar 3 is removed, and sidewall 10 of an insulating film is formed on the side surface of the opening of the portion where SiN film 5 is removed. Upper diffusion layer 11 is formed by ion implantation and thermal treatment after formation of the sidewall. Here, the method for forming sidewall 10 and upper diffusion layer 11 is the same as in the first exemplary embodiment.

Next, thin insulating film 17 is removed by HF etching. Subsequently, as shown in FIG. 4G, resist mask 18 is formed by ordinary lithography so as to be able to contact gate electrode 8 around Si pillar 3 b in contact with the side surface of STI insulating film 2, and a contact hole is provided by dry-etching insulating film 9 as shown in FIG. 4H.

Finally, as in the first exemplary embodiment, upper diffusion layer 11 is exposed, and electrode 13 is buried, and electrode 14 which contacts gate electrode material 8 of the dummy transistor is buried, whereby the structure shown in FIGS. 5A and 5B is produced.

Third Exemplary Embodiment Configuration of the Third Exemplary Embodiment

As shown in the sectional view of FIG. 8A, in a semiconductor device in which a vertical MOS transistor including lower diffusion layer 6 and upper diffusion layer 11, with Si pillar 3 made a channel part, and including gate insulating film 7 and gate electrode 8 on a side surface of the channel part is formed in a region surrounded by shallow trench isolation, and lower diffusion layer 6 described above is formed in a portion shallower than the depth of the shallow trench isolation, a contact and STI sidewall electrode 14 are formed in contact with gate electrode material 8 formed on the side surface of STI insulating film 2. In this case, by moving Si pillar 3 of the vertical MOS transistor toward STI insulating film 2, gate electrode 8 of the vertical MOS transistor and gate electrode material 8 described above formed on the side surface of STI insulating film 2 are brought into contact with each other. Thereby, the gate potential of the vertical MOS transistor can be controlled through sidewall electrode 14 over STI insulating film 2 described above. Accordingly, in this configuration, Si pillar 3 a and electrode 15 which contacts the gate electrode material formed on the sidewall of Si pillar 3 a as shown in FIGS. 3A and 3B are not required.

For STI sidewall gate electrode 14, an optional place can be selected like an STI sidewall gate electrode contact (I) to an STI sidewall gate electrode contact (II), as shown in the plane view of FIG. 8B. The contact position can be selected in the portion which does not interfere with the disposition of electrode 13 or the like connected to upper diffusion layer 11 of the vertical MOS transistor, and disposition of wiring further on the upper layer of it and the like.

As described above, by controlling the potential of STI sidewall gate electrode 14, the gate potential of the vertical MOS transistor can be controlled. Therefore, formation of a new contact for the gate electrode of the vertical MOS transistor is not required, and layout becomes easy.

Manufacturing Method of the Third Exemplary Embodiment

A method for manufacturing the exemplary embodiment shown in FIG. 8A will be described by using FIG. 7A to FIG. 7G.

First, as shown in FIG. 7A, STI insulating film 2 is formed in Si substrate 1. STI insulating film 2 is formed by an ordinary method. Specifically, STI insulating film 2 is formed by Si dry etching, burying the insulating film and flattening the insulating film. The method for forming the well and STI insulating film 2 is the same as in the first exemplary embodiment.

Next, as shown in FIG. 7B, Si processing masks (4, 5) are formed in the portion where Si pillar 3 is to be formed, and Si pillar 3 is formed by ordinary Si dry etching. The method for forming Si pillar 3 is the same as in the first exemplary embodiment.

Thereafter, as shown in FIG. 7C, lower diffusion layer 6 and gate insulating film 7 are formed. Lower diffusion layer 6 is formed by ordinary ion implantation and thermal treatment. Gate insulating film 7 may formed by thermally oxidizing the side surface of the Si pillar, or may be formed by an ordinary film deposition method. The method for forming lower diffusion layer 6 and gate insulating film 7 is the same as in the first exemplary embodiment.

Next, as shown in FIG. 7D, gate electrode 8 is formed on the side surface of Si pillar 3. Gate electrode 8 is formed by an ordinary etch back method after the gate electrode material is deposited. At this time, gate electrode material 8 also remains on the side surface of STI insulating film 2, and gate electrode 8 of the vertical MOS transistor and gate electrode material 8 described above formed on the side surface of STI insulating film 2 are in contact with each other. The method for forming the gate electrode is the same as in the first exemplary embodiment.

Thereafter, as shown in FIG. 7E, insulating film 9 is deposited and flattened. In this case, flattening of the insulating film is carried out by an ordinary CMP method, and the stopper in the CMP method is SiN film 5 which is used as the processing mask for Si pillar 3.

Subsequently, as shown in FIG. 7F, SiN film 5 is removed, and sidewall 10 of an insulating film is formed on the side surface of an opening of the portion where SiN film 5 is removed. Upper diffusion layer 11 is formed by ion implantation and thermal treatment after formation of sidewall 10. In this case, the method for forming sidewall 10 and upper diffusion layer 11 is the same as in the first exemplary embodiment.

Next, as shown in FIG. 7G, a contact hole is provided in insulating film 9 in the portion where STI sidewall electrode is formed. In this case, resist mask 12 is formed by ordinary photolithography technique, and the contact hole is provided. Finally, after resist mask 12 is removed, silicon oxide film 4 is etched with insulating film sidewall 10 as the mask to expose upper diffusion layer 11, and electrode 13 and electrode 14 are buried. By the method as above, the structure shown in FIGS. 8A and 8B is produced.

In the present exemplary embodiment, Si pillar 3 b for the dummy transistor as shown in the second exemplary embodiment may be formed separately from Si pillar 3 for the vertical MOS transistor, and the contact and electrode 14 may be formed in contact with gate electrode material 8 of the dummy transistor. Further, the dummy transistor manufactured in the same process as the vertical MOS transistor may be provided between STI insulating film 2 and the vertical MOS transistor, and the gate potential of the vertical MOS transistor may be controlled by electrode 14 which contacts conductive sidewall 8′ via the gate electrode material of the dummy transistor.

Fourth Exemplary Embodiment Configuration of the Fourth Exemplary Embodiment

As shown in the sectional view of FIG. 10A, in a semiconductor device in which a vertical MOS transistor including lower diffusion layer 6 and upper diffusion layer 11, with Si pillar 3 made a channel part, and including gate insulating film 7 and gate electrode 8 on a side surface of the channel part is formed in a region surrounded by STI insulating film 2, and lower diffusion layer 6 described above is formed in a portion shallower than the depth of STI insulating film 2, a gate electrode or Si pillar 3 b of a dummy transistor of the similar structure as the above described vertical MOS transistor are formed to be at least in contact with the side surface of STI insulating film 2, and a contact and electrode 14 are formed in contact with gate electrode material 8 of the above described dummy transistor which is in contact with the side surface of STI insulating film 2. In this case, by moving Si pillar 3 of the vertical MOS transistor at the left in the drawing closer to Si pillar 3 b of the dummy transistor formed to be in contact with the side surface of STI insulating film 2, gate electrodes 8 of both the transistors are in contact with each other. Thereby, the gate potential of the vertical MOS transistor can be controlled through electrode 14.

For gate electrode 14 which contacts gate electrode material 8 of the dummy transistor in contact with the side surface of STI insulating film 2, an optional place can be selected like a contact (I) to a contact (II), as shown in the plane view of FIG. 10B. The contact position can be selected in the portion which does not interfere with the disposition of electrode 13 connected to upper diffusion layer 11 of the vertical MOS transistor, and disposition of wiring further on the upper layer of it.

As described above, by controlling the potential of STI sidewall gate electrode 14, the gate potential of the vertical MOS transistor can be controlled. Therefore, formation a new contact for the gate electrode of the vertical MOS transistor is not required, and layout becomes easy. Further, conductive sidewall 8′ formed on the side surface of the STI insulating film is not brought into a floating state.

Manufacturing Method of the Fourth Exemplary Embodiment

A method for manufacturing the exemplary embodiment shown in FIG. 10A will be described by using FIG. 9A to FIG. 9G.

First, as shown in FIG. 9A, STI insulating film 2 is formed in Si substrate 1. The method for forming the well and STI insulating film 2 is the same as in the first exemplary embodiment.

Next, as shown in FIG. 9B, Si processing masks (4, 5) are formed in the portion where Si pillars 3 and 3 b are to be formed, and Si pillars 3 and 3 b are formed by ordinary Si dry etching. Here, Si pillar 3 b in contact with the side surface of STI insulating film 2 is also formed. In the sectional view, Si pillar 3 at the left side in the drawing is shown as if it were not surrounded by shallow trench insulation, but in plane view, Si pillar 3 at the left side in the drawing is formed in the portion surrounded by the area of STI insulating film 2. The method for forming Si pillars 3 and 3 b described above is the same as in the first and the second exemplary embodiments.

Thereafter, as shown in FIG. 9C, lower diffusion layer 6 and gate insulating film 7 are formed. Lower diffusion layer 6 is formed by ordinary ion implantation and thermal treatment. Gate insulating film 7 may be formed by thermally oxidizing the side wall portion of the Si pillar, or may be formed by an ordinary film deposition method. The method for forming lower diffusion layer 6 and gate insulating film 7 is the same as in the first exemplary embodiment.

Next, as shown in FIG. 9D, gate electrode 8 is formed on the side surfaces of Si pillars 3 and 3 b. Gate electrode is formed by an ordinary etch back method after the gate electrode material is deposited. At this time, gate electrodes 8 of both the transistors are in contact with each other. The method for forming the gate electrodes is the same as in the first exemplary embodiment.

Subsequently, as shown in FIG. 9E, insulating film 9 is deposited and flattened. In this case, flattening of the insulating film is carried out by an ordinary CMP method, and the stopper in the CMP method is SiN film 5 which is used as the Si pillar processing mask. Further, after thin insulating film 17 is deposited, the thin insulating film on Si pillar 3 at the left in the drawing is removed by using ordinary lithography and dry etching. Here, as thin insulating film 17, a material which is not etched by hot phosphoric acid for removing SiN film 5, and is higher in HF etching speed than insulating film 9 is selected. For example, an SOG film is selected as the thin insulating film.

Next, as shown in FIG. 9F, SiN film 5 on Si pillar 3 is removed, and sidewall 10 of an insulating film is formed on the side surface of an opening of the portion where SiN film 5 is removed. Upper diffusion layer 11 is formed by ion implantation and thermal treatment after formation of sidewall 10. In this case, the method for forming sidewall 10 and upper diffusion layer 11 is the same as in the first exemplary embodiment.

Next, as shown in FIG. 9G, thin insulating film 17 is removed by HF etching, resist mask 18 is formed by ordinary lithography technique so as to be able to contact gate electrode 8 around Si pillar 3 b in contact with the side surface of STI insulating film 2, and a contact hole is provided by dry-etching insulating film 9.

Finally, SiO₂ film 4 on Si pillar 3 is etched with insulating film sidewall 10 as the mask to expose upper diffusion layer 11, and electrode 13 is buried. Further, electrode 14 is buried in the contact hole of gate electrode 8 around Si pillar 3 b. By the method as above, the structure shown in FIGS. 10A and 10B is completed.

In the above example, the shape of the Si pillar is described as a circular cylinder, but the shape of the Si pillar is not limited to this, and can be various shapes such as a polygonal cylinder, and an oval cylinder. Further, the shapes of the Si pillar for the vertical MOS transistor and the Si pillar for the dummy transistor do not have to be the same, and may be different shapes of difference sizes in accordance with the object.

The semiconductor device of the present invention can be favorably used for the cell transistor of a semiconductor recording device such as a DRAM, and can configure a microscopic cell such as a 4F² cell.

It is apparent that the present invention is not limited to the above embodiments, but may be modified and changed without departing from the scope and spirit of the invention. 

What is claimed is:
 1. A method for manufacturing a semiconductor device including a vertical MOS transistor, comprising: forming a trench for shallow trench isolation in a semiconductor substrate, and burying an element isolation insulating film in the trench; forming an insulating film to be a mask for forming a semiconductor pillar, in a region subjected to shallow trench isolation; etching the semiconductor substrate in the region subjected to the shallow trench isolation with said insulating film as a mask, and forming a semiconductor pillar for the vertical MOS transistor; implanting an impurity onto the semiconductor substrate, and forming a lower diffusion layer in the portion shallower than the depth of the shallow trench isolation; forming a gate insulating film on the semiconductor substrate and the side surface of the semiconductor pillar for the vertical MOS transistor; depositing a gate electrode material, etching back the gate electrode material, and leaving a gate electrode on the side surface of the semiconductor pillar for the vertical MOS transistor on which the gate insulating film is formed, and leaving the gate electrode material on the side surface of the element isolation insulating film; forming an interlayer insulating film and flattening the interlayer insulating film to the height of the mask insulating film; removing the mask insulating film on the semiconductor pillar for the vertical MOS transistor, and forming a sidewall insulating film in an opening which is formed; implanting an impurity via the sidewall insulating film, and forming an upper diffusion layer on the top portion of the semiconductor pillar for the vertical MOS transistor; and forming an electrode which contacts the gate electrode material on the side surface of the element isolation insulating film.
 2. The method for manufacturing a semiconductor device according to claim 1, wherein the semiconductor pillar for said vertical MOS transistor is formed close to the region subjected to the shallow trench isolation, wherein said gate electrode material formed on the side surface of the element isolation insulating film is formed to be in contact with the gate electrode of said vertical MOS transistor.
 3. A method for manufacturing a semiconductor device according to claim 2, wherein, said forming an electrode is forming an electrode which contacts the gate electrode material on the side surface of the semiconductor pillar of a dummy transistor different from said vertical MOS transistor.
 4. The method for manufacturing a semiconductor device according to claim 3, wherein the semiconductor pillar for said vertical MOS transistor is formed close to the region subjected to the shallow trench isolation, or close to the semiconductor pillar for the dummy transistor, and said gate electrode material formed on the side surface of the element isolation insulating film, or a gate electrode material of said dummy transistor in contact with the gate electrode material formed on the side surface of the element isolation insulating film is formed to be in contact with the gate electrode of said vertical MOS transistor. 